Larry F. Thompson

Larry F. Thompson is Managing Partner of the IPSS Consulting Company. He has worked in the semiconductor industry for 35 years in the areas of materials research and semiconductor process development at Bell Laboratories as well as in the semiconductor equipment industry at Integrated Solutions and Ultratech Stepper. He has held senior management positions since 1992 including CEO, President, CTO and member of the board of directors. Dr. Thompson received his B.S. degree in Chemistry and M.S. degree in Chemistry/Nuclear Engineering from Tennessee Technological University. He holds a PhD in Chemistry/Chemical Engineering from the University of Missouri. He has over 160 publications and holds 28 patents in the areas of semiconductor processing and materials engineering. He has served on the Board of Directors of the American Chemical Society and is a member on the National Academy of Engineering.

As a research engineer at Bell Laboratories he invented, developed and introduced into manufacture several polymeric resist materials used to produce chromium masks including PBS and COP. He managed the group responsible for developing chemically amplified deep-uv resists and was instrumental in developing 248nm lithography and won the SEMI award for Innovation for this contribution. He has worked in many areas in semiconductor processing including advanced lithography, plasma processing and new materials. He received the Semi Award for Innovation in 1998 for the invention and development of 248nm deep-uv lithography. During his career at Bell Laboratories, he held several management positions in Research and Development. He worked with the Intellectual Property Division and was instrumental in several significant licensing agreements including electron beam lithography for mask fabrication and deep-UV resist materials.

After leaving Bell Labs he joined Integrated Solutions Inc. (ISI) and served as the Chief Technical Officer and a member of the Board of Directors. He led the effort to license the advanced XLS stepper technology from General Signal Corporation. At ISI he managed the design and introduction into manufacture of the world’s first 193nm deep – UV lithography stepper. In 1997 he was instrumental in the successful sale of ISI to Ultratech Stepper where he served as Vice President of Advanced Technology and President of the Ultrabeam Lithography Division. He currently serves on the Ultratech Technical Advisory Board.

In June of 2002, he became CEO and President of the New Jersey Nanotechnology Consortium and was responsible for setting up an independent, for-profit company to capitalize on the Advanced Semiconductor Development Laboratory facilities and personnel of Lucent Technologies, Bell Laboratories.

He currently is president of his own consulting business in the area of intellectual property, semiconductor materials, equipment and processing.